【For Precision Machining】Open Aperture 50mm Piezo Scanner P-517/527
Frictionless flexure guide integrated structure. High-performance scanner supporting precision machining at the nano level.
In the field of precision machining, further miniaturization and quality enhancement are progressing, with positioning accuracy at the nano level becoming a crucial factor that influences product performance. Particularly in laser processing and micro-patterning, even slight errors caused by vibrations and friction directly affect processing quality. The P-517/P-527 multi-axis piezo scanner adopts a frictionless flexure guide integrated structure, eliminating backlash and wear. With PICMA piezo ceramics and high-resolution capacitive sensors, it achieves nano-level reproducibility and high dynamics. Its stable high-speed response enables precise position control in micro-machining, contributing to improved processing quality and yield. 【Application Scenarios】 - Laser micro-machining equipment - Micro-patterning - Wafer processing and inspection equipment - Nano-positioning applications - Precision measurement and machining systems 【Benefits of Implementation】 - Nano-level high-precision machining control - Improved processing quality due to stable operation - Reduced processing time and increased productivity - Cost reduction through improved yield
- Company：PI Japan
- Price：Other
![[For Measurement] Aperture 50mm Piezo Scanner P-517/527](https://image.mono.ipros.com/public/product/image/311014/IPROS5640812223458587889.jpg?w=280&h=280)
